@inproceedings{pietersma2007c,
	author          = {Jurryt Pietersma and Arjan J.C. van Gemund},
	title           = {Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment},
	booktitle       = {Proceedings of INCOSE 2007, 17th International Symposium on Systems Engineering},
	year            = {2007},
	month           = {June},
	organization    = {INCOSE},
	pages           = {1-12},
	note            = {best student paper},
	number          = {Paper ID 2277 p072},
	isbn            = {0-9720562-5-4},
	location        = {San Diego, CA, USA},
	url             = {https://www.incose.org/ipub/07/p072.pdf},
	project         = {Tangram},
	topic           = {Model-Based Diagnosis},
	group           = {SE}
}